Nano Positioning Stage : DigInfo

Nano Positioning Stage : DigInfo

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DigInfo - http://movie.diginfo.tv The nano positioning stage developed by Chuo Precision Industrial is loaded with a sample in ultra high precision at the targeted position in micro control technology environments typified by modern day nanotechnology such as semiconductor manufacturing and nano biological related technology. The device is configured from a two axis stage with an X-axis and Y-axis and first implements rough feed to position the stage in the approximate position on a micrometer level. From there, slow motion (micro jogging) feed is implemented with the control of a custom controller that uses a strain gage with a piezo element, to achieve a resolution power of 10 nanometers (when the distance of travel is 10 micrometers). As a result, the precision of magnified measurements of the observed position is dramatically improved in micro measurements. The XY nano positioning stage is also equipped with a linear scale and features closed loop control, so the stage can be aligned to the target position while easily reading the digital potentiometer and numeric figures for both the X and Y axes of the XY stage system with the custom controller.

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